Technology suitable small quantity production
Physical Vapour Deposition (PVD) for micromachining of metal is mainly done by sputtering. It consists on the application of metal layers of thickness between 25 nm to 5 microns. Metals like Cu, Al, Ti, Cr, and oxides Al2O3 are the most common ones. It is used to produce diffraction gratings, pressure sensors, and micro moulds.